Flaw characterization in structural ceramics using scanning laser acoustic microscopy

摘要

The ability of scanning laser acoustic microscopy (SLAM) to characterize artifically seeded voids in sintered silicon nitride structural ceramic specimens was investigated. The voids ranged from 20 to 430 microns in diameter and were embedded up to 2 mm beneath the surface of the specimens. Probability of detection was determined as a function of void depth and size. Trigonometric relationships and Airy's diffraction theory were used to obtain predictions of void depth and size from acoustic diffraction patterns produced by the voids. Agreement was observed between actual and predicted void depths. However, predicted void diameters were generally much greater than actual diameters. Precise diameter predictions are difficult to obtain because of measurement uncertainty and the limitations of the 100 MHz SLAM applied to typical ceramic specimens.